Front-End Cooling Plate
Large aluminum plates and tubing are joined together via mechanical connection. High sealing and cleanliness of the tubing ensure equipment temperature uniformity, thus guaranteeing film deposition uniformity and improving deposition success rates.
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Product Characteristics
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产品参数
Product Characteristics
Large Dimensions
3000mm*2000mm*13mm Large thin plate part
High Sealing Performance
Sealing performance of gas lines exceeds requirements of major clients.
Connection Technology
Mechanical connection between substrate and tubing.
产品参数
| Material: | Aluminum Alloy |
| Dimensional Accuracy: | 0.05mm |
| Connection Method: | Mechanical Connection |
